KrF深紫外光刻膠系列

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KrF深紫外光刻膠系列

Kind 型號	Performance 性能	Application 應用
DK1081	R:0.18μm,Thickness range:0.4um-0.8μm	AA/Poly/CT
DK1080	R:0.25μm,Thickness range:0.55μm-1.0μm	Implant/AA/CT
DK1088	R:0.25μm,Thickness range:0.8μm-1.4μm	TV/TM/Implant
DK1089	R:0.25μm,Thickness range:0.8μm-1.4μm	TV/TM/Implant
DK1087	R:1μm,Thickness range:3-4μm	Special application/ PAD
DK2060	R:0.25μm,Thickness:0.55-0.8μm	Contact/Hole
DK3030	R:0.25μm,Thickness:0.6-0.8μm	AA/Metal/Contact/Hole
DKN1100	Krf Negative PR R:0.20μm,Thickness:0.4-0.8μm	SAB/Implant

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